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MEMSnet Home: MEMS-Talk: thin Ti/Pt/Au
thin Ti/Pt/Au
2006-01-21
[email protected]
thin Ti/Pt/Au
[email protected]
2006-01-21
Hello

we would like to make a Ti/Pt/Au stack as electrode materials. We would like to
use as thin as possible electrodes. The gold should be around 20nm.
What is the smallest thickness for Ti and Pt we should use?


Best regards
Daniel

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