Andrea,
VEECO NT 3300 goes down to that range.
I am sure Veeco has other optical profilometrs that might fit your
requirements.
Best Regards
Sumant Sood
Belford Research Inc.

-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of [email protected]
Sent: Monday, January 23, 2006 4:44 PM
To: [email protected]
Subject: [mems-talk] optical profilometer

Hi all.
I'm looking for an optical with a vertical resolution up to 10A.
Can someone suggest me a good product ?