Liang,

I would guess that your wafer wasn't properly cleaned or that you have
particles (dirt) in your resist bottle. Hopefully you aliquot it out in a
medicine dropper. Also be sure to pirhana and BOE your wafer.

        - cheers - Gabe

-----Original Message-----
From: jx liang [mailto:[email protected]]
Sent: Saturday, January 28, 2006 12:07 AM
To: [email protected]
Subject: [mems-talk] How to spin the lift off resist LOR15A?

Hi,everyone

I tried to spin the lift off resist LOR15A on a 40mm
square wafer, but many many residues like hair
appeared out of the wafer edge even at the high speed
of 6000rpm.
Who can give me any advice?

Thank you in advance.

Liang