Dear All,

I am trying to source equipment for SU-8 processing (approx 4 inch
substrate size). I will be coating thick layers (>500microns) on both
silicon and glass/quartz.
Could somebody please recommend possible solutions for the following
equipment with some idea of cost:

UV exposure system (not necessarily a proper mask aligner - a well
collimated UV source would be sufficient)
A contact hotplate for pre-bake and PEB

Many thanks

Gareth