Hello Mems experts,

I want to evaporate 1000 A of pt on my substrate. The problem is the
tungsten filament is getting too hot and the quartz crystal monitor which
monitors the thickness is also getting too hot. Is there a way for
avoiding the heat on the crystal monitor or is there some other easy way
of evaporation. I have difficulty specially with platinum.The crystal
monitor is already water cooled.

Thanks for your time and any kind of ideas is appreciated
baloo

Balaji Panchapakesan
Department of Mechanical Engineering
University of Maryland, College Park MD20740

Email:[email protected]