hi bin,
             I think you can apply photoresist and protect the Al.A think
photoresist will prevent etching of AL.  Letme know when you are done......

    Hithesh Gatty

Bin Liu  wrote:
  Dear all
i am looking for a physical coating for Aluminum so that it wont be
attack by 49%HF while releasing MEMS. My aluminum is about 70nm thick
which is used to be a reflective layer. or, if you have other
suggestions of protection I will appreciate, too!

yours
Bin
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