Bin,

Photoresist will not hold up to HF.  Your Al will undercut very fast.

Brent

Bin Liu wrote:

> Dear all
> i am looking for a physical coating for Aluminum so that it wont be
> attack by 49%HF while releasing MEMS. My aluminum is about 70nm thick
> which is used to be a reflective layer. or, if you have other
> suggestions of protection I will appreciate, too!