Hello Masa
    I found the software INTELLISENSE 8.0 as a good one for designing MEMS
devices, simulation of FAB processes and finally the charateristics
simulation.

hope it helps.

best regards
Hari Ramnath
MSEE
Wayne State University,Detroit,MI

On 2/7/06, Masahiko Takei  wrote:
>
> Hi folks,
>
> We are looking for a simulation software for MEMS design.
> It should be easy to operate, accurate, and widely used in the world.
> We would appreciate any suggestion on it.