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MEMSnet Home: MEMS-Talk: Re: SU8 fabrication on coverglass
Re: SU8 fabrication on coverglass
2006-02-09
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Re: SU8 fabrication on coverglass
[email protected]
2006-02-09
Just an update of the old thread. These days I also try baking IPA
cleaned coverglass at 250 C for at least 5 min before spin coating.
This also helped as suggested in Lung-hao's reply. There is obvious
variability in the properties of coverglass from Fischer. This time
the whole box of glass sticks together probably due to surface
contamination. I could see a colorful layer on it. So cleaning should
be necessary. Hope this helps.


Best,
Liu Yu
On 12/28/05, Lung-hao Hu  wrote:
> Try to use Pirahna or O2 plasma to clean your glass and bake 150 C for 10 min
to
> evaporate the water vapor.
> And coating Omnicoat to be the adhesion layer and coating a thin layer of
> SU8-2002. After that coating your feather layer (SU-8 2025).
> SU-8-SU-8 bonding is pretty good.
reply
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