It's compatible - used for final passivation for cmos products
shay

-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of WILLIAMSON Fraser
Sent: Thursday, February 09, 2006 7:15 PM
To: 'General MEMS discussion'
Subject: [mems-talk] CMOS compatability of Polyimide

Hi,

I would be interested to know the CMOS compatability of Polyimide (PI 2610).

Does anyone know anything about this.