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MEMSnet Home: MEMS-Talk: Substitute for EDP
Substitute for EDP
2006-02-10
Vinay
Substitute for EDP
Vinay
2006-02-10
Hello All,
We are looking for a subsitute for EDP. We are trying to etch Si using
a highly doped (Boron) region as a mask to form thin diaphragms. I
believe EDP works best for this application, but is very hazardous.
Could any of you suggest another wet etchant which i could use in its
place?

Thanks,
vinay
reply
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