Hi, I used Edwards ebeam evaporator to deposit 5nm Ti and then 50nm Au on PMMA
(A5). But the
resulting coated PMMA has a very rough surface and it seems there are many big
and small bubbles
bursted there. Is it because the deposition condition (106mA, 0.6nm/sec) or bad
PMMA? The
temperature increased over 100oC during deposition.

PMMA with only Ti deposition has no problem, so the problem must be from Au.

Thanks!

Junyu