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MEMSnet Home: MEMS-Talk: Undercut uniformity of Gold wet etching
Photosensitive PDMS exposure time
2006-02-13
Vinodh Murali
Undercut uniformity of Gold wet etching
2006-02-14
X.P. Zhu
2006-02-14
Ad Hall
Undercut uniformity of Gold wet etching
X.P. Zhu
2006-02-14
Hi,
    I am using KI/I2 to etch gold pattern. The
thickness of the gold layer which is on 2 inch wafer
is more than 1.5 micron. The etching rate at the edge
of the wafer is faster and in center it is slower. So
when the pattern in center is OK the undercut at the
edge will be not accepted (often > 3 micron). How to
reduce the undercut? Thank you for any advice.

Mopa

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