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MEMSnet Home: MEMS-Talk: bandwith for capacitive, piezoR and Piezoelectric device
bandwith for capacitive, piezoR and Piezoelectric device
2006-02-16
Julie Verstraeten
bandwith for capacitive, piezoR and Piezoelectric device
Julie Verstraeten
2006-02-16
Hi,

Does some of you have an idea of the characteristic bandwidth of piezoresistive,
piezoelectric and capacitive device?


I've read in some litterature that piezoresistive, piezoelectric and capacitive
(comb-drive) devices have characteristic bandwith til few kHz, 30kHz and up to
50kHz respectively. I don't kwow where are these values from since these must
be dependant of mass and stiffness of the related structures.


I actually would like to know if capacitive sensing (force in my case) using
comb-drive is well adapted for dynamic mode (and better than piezoelectric and
piezoresistive ones).


Does someone has information about this?

Thank you,

Julie
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