You can check out the following 2 papers for etch gas and etch rates:

Kirt R. Williams; Richard S. Muller. "Etch Rates for Micromaching
Processing" J. MEMS., 1996, 5(4), 256-269.
Kirt R. Williams; Kishan Gupta; Matthew Wasilik.  "Etch Rates for
Micromaching Processing-Part II". J. MEMS. , 2003, 12(6),761-778.

Ling
----- Original Message -----
From: "Jauniskis, Linas" 
To: 
Sent: Friday, February 17, 2006 3:00 PM
Subject: [mems-talk] plasma etch gas for glass, silicon


> Could someone recommend standard plasma etch gasses for glass and
> silicon.