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MEMSnet Home: MEMS-Talk: anisotropic etching of silica
anisotropic etching of silica
2006-02-24
yilei zhang
2006-02-25
Pradeep Dixit
2006-02-28
yilei zhang
2006-02-28
Hongjun-ECE
2006-02-27
Fulvio Mancarella
anisotropic etching of silica
yilei zhang
2006-02-24
Dear colleagues,
Is there a way to get high aspect ratio of silica structures? Like DRIE for
silicon? Thanks.

Regards,
Yilei Zhang

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