Hi,Everyone
Right now I am trying to sputtering silicon nitride on copper and silicon
surface. Right now I have nitride target on hand. Can anyone give me some
suggestion on the sputtering parameters? Such as do I have to have nitrogen gas
flow beside the argon flow ? If yes, what is flow rate of the argon and nitrogen
? what is the RF power as well ?
Thanks for your helps.
J.J. Wang