Did anybody try to use MF319 for AZ1500
series developer?
Bin Liu
2006-02-28
Hi Sokwon
I have used Shipley 354 as developer for AZ5214. I have no idea whether
mf319 works.....
Bin
sokwon Paik wrote:
> Hi!
>
> I want to use MF319 to develop AZ1518 layer ( I don't want to buy developer
if I can...I have AZ 1518 pre-coated wafers).
>
> According to the manual I can use most type of positive PR developer.. So, I
think I can use MF 319 for my wafer and some paper state that they used MF319
for some AZ1500 series.
>
> But the tehnical support person hestitate to say "yes" and instead of say
yes they said I can try to develope and then if OK then I can use......
>