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MEMSnet Home: MEMS-Talk: Re: microaccelerometer
Re: microaccelerometer
1998-06-29
Knut Buettner
Re: microaccelerometer
Knut Buettner
1998-06-29
>
>hello!
>
>i want to know the consequence if the voltage on electrode-plates
>(fingers) of a microaccelerometer is unstable (for example, changes
between
>-5% and +5%)?
>
>best regards
>

Hello Xu Jun,

in this case you get an accelerometer vibrating with the frequency applied
(changes are slower than the resonanc frequency of the accelerometer), no
changes in the behaviour (higher than the resonance frequency with a
Gaussian statistical distribution around 0% changes) or it carries out a
deviation from the nominal point (distribution around a different value)
respectively, depending on the characteristic of the applied voltage.

Knut Buettner


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