Dear all,

Does anybody know where to buy AuSn preform? I contacted Indium Corp.,
but the NRE fee is high.

I was recommeded to use Ni as the wetting layer for AuSn bonding.
Before the bonding, the Ni will be oxidized in O2 plasma extensively.
Unfortunetely, I can not put Au on top of Ni to protect it during O2
plasma. I was recommended to pass forming gas to reduce NiO before
AuSn bonding. Does anybody know what temperature it requires for NiO
to be reduced to Ni?

If anybody has experience in MEMS vacuum bonding, can I contact you to
ask more questions?

Thanks a lot.
Chongfei