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MEMSnet Home: MEMS-Talk: About Cr/Au etchant on the InGaAs/InP substrate
About Cr/Au etchant on the InGaAs/InP substrate
2006-03-03
Zhang Zhenfeng
About Cr/Au etchant on the InGaAs/InP substrate
Zhang Zhenfeng
2006-03-03
Dear All,
I evaported Cr and Au to the InGaAs/InP material.And I etched Au with KI:I2:H2O
etachant then etched Cr with KMnO4.But there are a very thin Cr layer can't
etch.Can you help me?
Thanks!

Zhang Zhenfeng

reply
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