A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: Etch Trihedral Structure
Etch Trihedral Structure
2006-03-03
Boyd Evans
Etch Trihedral Structure
Boyd Evans
2006-03-03
I am looking for potential processes to fabricate or etch three-sided =
pyramid structures with walls that are perpendicular to each other.  It =
would be preferred that these were protruding (convex) from the surface, =
but concave structures might be useful as well. 100 Silicon produces =
four-sided pyramids, so that will not work for our purpose. Any =
suggestions would be appreciated.
=20
Thank-you,
Boyd Evans

Center for Musculoskeletal Research
University of Tennessee
301 Perkins Hall
Knoxville, TN 37922
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Harrick Plasma, Inc.
Nano-Master, Inc.
MEMStaff Inc.
Tanner EDA by Mentor Graphics