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MEMSnet Home: MEMS-Talk: Electroplating onto SU-8
Electroplating onto SU-8
2006-03-04
Iskandar Samad
2006-03-04
g.balsubra manian
2006-03-05
Pradeep Dixit
2006-03-05
g.balsubra manian
Electroplating onto SU-8
Iskandar Samad
2006-03-04
Hi all, Im looking to electroplate some copper onto SU-8 photoresist and
was wondering if anyone has had experience with this. Btw, the SU-8 has
been prepatterned and cured on a silicon wafer.

Are there any issues about whether the sputtered/evaporated seed layer
(for plating) adheres well to the SU-8, and if so what material seed
would you suggest? Is there any material I could pre deposit that could
perhaps aid adhesion?

Thanks, regards,

--
Iskandar Samad


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