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MEMSnet Home: MEMS-Talk: photolithography on top of SU8
About Sputtering Silicon NItride
2006-02-28
J.J wang
2006-02-28
Michael D Martin
photolithography on top of SU8
2006-03-04
[email protected]
2006-03-05
J.J wang
2006-03-05
sokwon Paik
photolithography on top of SU8
[email protected]
2006-03-04
Hello all,

I am wondering is it possible to spin on positive photoresist on top of SU8(with
patterns already) and then do the photolithography?
Thanks,

Jason

reply
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