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MEMSnet Home: MEMS-Talk: photolithography on top of SU8
About Sputtering Silicon NItride
2006-02-28
J.J wang
2006-02-28
Michael D Martin
photolithography on top of SU8
2006-03-04
[email protected]
2006-03-05
J.J wang
2006-03-05
sokwon Paik
photolithography on top of SU8
sokwon Paik
2006-03-05
Yes.
  SU-8 is one of the most hard to remove material. so you can freely do the
lithography on SU-8 layer.


  [email protected] wrote:
  Hello all,

I am wondering is it possible to spin on positive photoresist on top of SU8(with
patterns already) and then do the photolithography?
reply
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