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MEMSnet Home: MEMS-Talk: Thermal Growth silicon dioxide
Thermal Growth silicon dioxide
2006-03-08
Hui Han
2006-03-08
Shay Kaplan
2006-03-09
Martin J Prest
2006-03-09
Leo Petrossian
2006-03-10
Roger Brennan
Thermal Growth silicon dioxide
Hui Han
2006-03-08
Hi, all,
   I need some help in thermal growth SiO2, including the detailed steps
(for example, if the Si sbustrate are directly interted into and removed
out from the tube furnance or not), the rough growth rate.

   I want to use water steam to promote the oxidation.

Thanks for helps.
reply
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