Dear All,

I am looking for some detailed information/Journal papers about commonaly
known 'grass formation'/'Micromasking effect' in DRIE process.

As per my understanding, micromasking is due to incomplete polymer
removal in DRIE etching step. In certain conditions, polymer deposited in
passivation step is not completely etched away. This remaining polymer start
acting like a mask. As a result of this mask layer, a small area etches
slower than the surrounding field and grass kind structures form. However i
want more information about this mechanism.

Can any one provide me any papers, which gives detailed description of basic
mechanism, reason behind micromasking effect/grass formation and methods to
eliminate/reduce it without affecting other qualities.

I will be thankful if some one can provide me such papers.

Thanks,
Pradeep