Hi Yuchin,

What's the thickness of your teflon coating?

Duan

On 3/17/06, Yuchin  wrote:
>
> Hello all,
>
> I have some questions about depositing teflon(or teflon-like)
>
> 1. If there are some cavites  on silicon substrate.  I want to deposit teflon
on Si surface but not on Si3N4
>  (Si3N4 is in the cavity, as the figure).
>   How do I remove the teflon on Si3N4 easily after the CVD teflon process(or
other teflon deposit process)??
>   I know that the adhesion between teflon and Si3N4 is bad, may I immerse the
wafer in acetone(or something else)
>   to remove the teflon on Si3N4??
>   I can't use photolithography process, because the height of Si3N4 patterns
are  much lower than Si. PR can't coater well on it.
>


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