Steph
This is a most regular novolak based resist. Very much the 1518 etc just
with higher solid content and viscosity to give the thickness.
Shay

-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of steph champ
Sent: Tuesday, March 21, 2006 11:51 AM
To: [email protected]
Subject: [mems-talk] AZ4562

Does anybody know the composition of this positive photoresist ???
I don't really need the whole formulation, but if you have some clues about
it, let me know