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MEMSnet Home: MEMS-Talk: AZ4562
Electroplating Equipment Set-up
2006-03-05
J.J wang
2006-03-05
g.balsubra manian
2006-03-20
J.J wang
2006-03-20
g.balsubra manian
AZ4562
2006-03-21
steph champ
2006-03-21
Shay Kaplan
2006-03-21
abdou sar
2006-03-22
steph champ
AZ4562
abdou sar
2006-03-21
Hi steph ,
There is in this photoresist the some solvent and the most important thing
the photo active compound DNQ (Diazonaphtoquinone) if you want more
information about the positive phoresist AZ4562 you should visit this
following website www.microchemicals.com/lithography/photoresist_0002.html .
I hope that It will help you.

Abdou

>From: "Shay Kaplan" 
>Reply-To: General MEMS discussion 
>To: "'General MEMS discussion'" 
>Subject: RE: [mems-talk] AZ4562
>Date: Tue, 21 Mar 2006 17:15:11 +0200
>
>Steph
>This is a most regular novolak based resist. Very much the 1518 etc just
>with higher solid content and viscosity to give the thickness.
>Shay
>
>-----Original Message-----
>From: [email protected] [mailto:[email protected]]
>On Behalf Of steph champ
>Sent: Tuesday, March 21, 2006 11:51 AM
>To: [email protected]
>Subject: [mems-talk] AZ4562
>
>Does anybody know the composition of this positive photoresist ???
>I don't really need the whole formulation, but if you have some clues about
>it, let me know
>
reply
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