Hi all,
I recently started to try AZ4903 photoresist in order to coat thick PR
films. I found that it is much more viscous than other types such as
AZ1518, AZ4620, so I always had bubbles when dispensing the
photoresist directly by pouring it on wafers. Do you any suggestions
about the best way to dispense it? Our spinner does not have a spray
function so this method is not available...
Thanks,
PJ