Hello sirs,

Please can anyone help me estimating the thermal load introduced by an LPCVD
furnace into a cleanroom?

Some facts that may help:

- The number I need is just to design the cleanroom air system, it's
approximate. I don't have yet any manufacturer's specs since we don't know
which apparatus we would buy in one year from now, or so.
- We will accomodate the whole furnace into the room, because our service
area is not big enough, and we were not given a space we were counting on.
- The area of the room where it would be installed will be about 50 m3
- It would be for 6" wafers
- It would be a 4-tube standard one for LPCVD processes
- Power Supply:
  3/N/PE/60Hz*/220V/AC/*+-5% or
  3/N/OE/50Hz*/380V/AC/+-5%
- Gas Supply: N2 6.0, H2 Pd-Diffused, AsH3 100%, PH3 100%, SiH4 100%, P
inlet each 3-3,5 bar, Forming Gas 5% - 10% H2 in N2, Pneumatic: N2 techn.
7-8,5 bar
- Cabinet Ventilation: 2 x 1000m3/h
- Water cooling: Total FIow 4 l/min at Tinlet < 25°C Pinlet < 6 bar,
Differential Pressure < 4 bar
- Max. power consumption: I estimated 20 kVA

These data are estimated on fabricants' webpages. What I couldn't get is an
idea of how much heat would it deliver to the room, in order to put that in
the calculations for air equipment dimensioning.

Thank you so so much!!!!

Regards

Max