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MEMSnet Home: MEMS-Talk: Wet etchant for fluoropolymer
Wet etchant for fluoropolymer
2006-03-27
Arun Kumar
2006-03-28
wang
2006-03-28
Bill Flounders
Wet etchant for fluoropolymer
Arun Kumar
2006-03-27
Hi all,

        I have a teflon like plasma deposited fluoropolymer(CF) film on
silicon substrate. I tried to etch the CF alone with acetone. It doesnt have
any etching on CF, is there any other chemical etchant that removes the CF
alone?

Thank you,

Arun
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