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MEMSnet Home: MEMS-Talk: BOE chemical composition
BOE chemical composition
2006-03-27
Rupesh Sawant
2006-03-30
Kirt Williams
BOE chemical composition
Rupesh Sawant
2006-03-27
I am intending to etch mico-channels in glass by using BOE etchant. I
am little bit confused about the concentration of ammonium fluoride
used in the BOE. I have seen a ppt in which it is mentioned that 40%
ammonium fluoride had to be mixed with 48% HF in a desired ratio to
make a BOE solution. This ppt was mainly focussing on the etching of
silicon substrate. Do i need to follow the same concentration of NH4F
and HF for etching soda lime glass?

--
RUPESH SAWANT
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