1. liquid - try fluorosolv
2. plasma - see literature on plasma etching of Cytop
(spin coatable fluoropolymer). These recipes use CF4 and O2.

Bill Flounders
Berkeley Microlab

----- Original Message -----
From: Arun Kumar 
Date: Monday, March 27, 2006 7:41 am
Subject: [mems-talk] Wet etchant for fluoropolymer

> Hi all,
>
>        I have a teflon like plasma deposited fluoropolymer(CF)
> film on
> silicon substrate. I tried to etch the CF alone with acetone. It
> doesnt have
> any etching on CF, is there any other chemical etchant that removes
> the CF
> alone?