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MEMSnet Home: MEMS-Talk: about the products formed during the etch
about the products formed during the etch
2006-03-29
jiaxing Yang
about the products formed during the etch
jiaxing Yang
2006-03-29
Hi,everyone
Do you have any literature links for etching ZnMnSe
and ZnBeSe with RIE using H2 and CH4? I am not sure
about the products formed during the etch. I have no
experience etching the compounds. I need to know I can
use the equipment or not since it is a public one.

Thanks!!
reply
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