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MEMSnet Home: MEMS-Talk: Etchant for Si without etching CF
Etchant for Si without etching CF
2006-03-30
Arun Kumar
2006-03-30
Shile
Pattern cross-linked SU-8
2006-04-03
Richard Chang
2006-04-03
Richard H. Morrison
2006-04-03
Richard Chang
Etchant for Si without etching CF
Arun Kumar
2006-03-30
Hi all,

         Does anyone know any etchant that will etch Silicon alone leaving
Teflon like fluoropolymer which we get from the passivation stage of bosch
process?

Thanks in advance!

Arun

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