I am doing dry oxidation and use Deal Grove model to predict the thickness of
thermal oxide.The oxidation temperature 1000 C and the oxidation time is 100
min.
As refered from text book, the parabolic rate constant B is 0.0117u2/h, the
linear
rate constant B/A is 0.165u and the time shift ¦Ó is 0.37h.
The Deal Grove model predicts a thickness of about 0.092u for a 100 min's dry
oxidation on (100) wafer.

In my experiment, the O2 gas flow is 5 l/min, and the measured thickness is
about
0.075u. There is large deviation between the predicted and the measured
thickness.
I wonder if anybody can provide an explanation about this kind of deviation,
thanks in advance.