you can ascertain the conductivity type of the wafer by the angle between the
primary reference plane and secondary reference plane. For example, for (100)
wafer, if the angle between the Pri.Ref. and Sec. Ref. is 180 degree, it's
n-type
wafer, and if the angle between the Pri. Ref and the Sec. Ref. is 90 degree,
it p-type wafer.

ÔÚÄúµÄÀ´ÐÅÖÐÔø¾­Ìáµ½:
>From: "polly" 
>Reply-To: polly ,
General MEMS discussion 
>To: [email protected]
>Subject: [mems-talk] Conductivity type measurement
>Date:31 Mar 2006 07:33:09 -0000
>
>
> dear Sir
> Please suggest me an accurate way to ascertain the conductivity type (n-type,
p-type) of the wafer.
> Pourus
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