Hi, All,

  Does anybody know if RIE can pattern cross-linked SU-8?
  I look at microchem's website and RIE can be used to remove SU-8.
  The problem is the high power is needed. Also, it's for removal, not
patterning.

  Our RIE system can provide up to 500 W and the max O2 flow rate is 10
sccm.
  Does anybody can provide the recipe?

  Thank you in advance.

Richard