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MEMSnet Home: MEMS-Talk: Is there any way to etch a hole through on silicon wafer?
Is there any way to etch a hole through on silicon wafer?
2006-04-03
Jeff chen
Is there any way to etch a hole through on siliconwafer?
2006-04-03
Shile
Is there any way to etch a hole through on silicon wafer?
2006-04-03
Florian Herrault
Is there any way to etch a hole through on silicon wafer?
2006-04-07
Leo Petrossian
native silicon oxide growth rate
2006-04-09
li cai
2006-04-10
Duan
Is there any way to etch a hole through on silicon
2006-04-04
Carel Heerkens
Is there any way to etch a hole through on silicon wafer?
Jeff chen
2006-04-03
Hi,

I am working on a project which needs to etch a hole through the
silicon wafer (525 micron thick). The hole diameter is around 50
micron.
Does anyone have experience to do that?
Is there any way to do that? Etching? Laser excimer? or grounding
technology?

Thanks a lot.

Best,
Jifeng
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