MEMS-talk

News	MEMSnet Home: MEMS-Talk: Growing SiN on copper film using PECVD? Growing SiN on copper film using PECVD? 2006-04-04 Xiaoding wei 2006-04-19 K A Chan Cu will be oxidized Re: Growing SiN on copper film using PECVD? 2006-04-23 [email protected] Cu will be oxidized Re: Growing SiN on copper filmusing PECVD? 2006-04-24 Glenn Silveira 2006-04-25 K A Chan Cu will be oxidized Re: Growing SiN on copper film using PECVD? 2006-04-26 [email protected] Growing SiN on copper film using PECVD? Xiaoding wei 2006-04-04 Hi, Does anyone know if I can grow a SiN layer on copper film using PECVD method? Thanks reply
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