hi,
=20
you can remove it with remover 1165
hope it helps
________________________________
From: [email protected] =A5N=B2z Xiaoding wei
Sent: 2006/4/4 [=ACP=B4=C1=A4G] =A4U=A4=C8 09:35
To: [email protected]
Subject: [mems-talk] remove BPR-100
Hi everyone,
Does anyone have idea about how to completely remove BPR-100 resist? ( =
Dry
way is preferred).
Can RIE remove BPR-100 easily and completely?
Xiaoding