Properly applied (vapor or liquid deposited) silane or siloxane based
SAMs are very robust on native oxide-on-silicon and certainly should not
be damaged by exposure to water (including immersion for long periods).
It's a matter of using an appropriate deposition strategy.  Even better
it doesn't have to be particularly complicated, I've done this using a
three component solution and a simple dip deposition.

-Matt

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of yilei zhang
Sent: Wednesday, April 05, 2006 10:04 AM
To: [email protected]
Subject: [mems-talk] dip-coating superhydrophobic coating

Dear Colleagues,
Could anyone recommend a simple dip-coating solvent for superhydrophobic
coating? My sample is silicon and rough, so the spin-coating TEFLON may
not
work well, plus it looks very expensive. For silane SAM, it was reported
water may damage the coating, so anyone have any suggestions?