Dear all,
   I use SF6 dry etching some material, it takes more than half an hour, it
is pity the Si plate is etched also, which will pollute my sample during
etching process. So I try to find some material which can corrosion-proof
SF6 dry etching.
Could  you please give me some suggestions about it?
Thank you very much!
Kind regards!
Ruiying

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Ruiying Zhang, Electrical & Electronic Engineering,
University of Bristol
Tel:0044-0117-928-8136(O)
[email protected]