How about Piranha etch (3:1=H2SO4:H2O2)?

Regards,
Yilei Zhang


-----Original Message-----
From: Süleyman Umut EKER [mailto:[email protected]]
Sent: Saturday, April 15, 2006 10:11 AM
To: General MEMS discussion
Subject: [mems-talk] Teflon Remover

Hi all,

I am suspected, teflon-like material has been deposited on the sample during

RIE etch. I have tried to clean the sample with oxygen plasma but I couldn't

succeed. Does anybody know a solvent to remove teflon.
Thanks in advance.

Eker