I do not know of any dry process that will remove negative photoresist like
this one.  They are usually too thick but I am not quite up to speed on dry
processing. I would give HC2 a try followed by VCS Process with Kyzen 2422.


Good luck.

Jack

-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of Xiaoding wei
Sent: Tuesday, April 04, 2006 1:36 PM
To: [email protected]
Subject: [mems-talk] remove BPR-100

Hi everyone,
Does anyone have idea about how to completely remove BPR-100 resist? ( Dry
way is preferred).
Can RIE remove BPR-100 easily and completely?

Xiaoding