MEMS-talk

News	MEMSnet Home: MEMS-Talk: Growing SiN on copper film using PECVD? Growing SiN on copper film using PECVD? 2006-04-04 Xiaoding wei 2006-04-19 K A Chan Cu will be oxidized Re: Growing SiN on copper film using PECVD? 2006-04-23 [email protected] Cu will be oxidized Re: Growing SiN on copper filmusing PECVD? 2006-04-24 Glenn Silveira 2006-04-25 K A Chan Cu will be oxidized Re: Growing SiN on copper film using PECVD? 2006-04-26 [email protected] Growing SiN on copper film using PECVD? K A Chan 2006-04-19 Yes. You can. SiN layer can be used as Cu diffusion layer. ----- Original Message ----- From: "Xiaoding wei" To: [email protected] Sent: 04 April 2006 03:46:34 Subject: [mems-talk] Growing SiN on copper film using PECVD? > Hi, Does anyone know if I can grow a SiN layer on copper film using > PECVD method? reply
Events
Glossary
Materials
Links
MEMS-talk