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MEMSnet Home: MEMS-Talk: Growing SiN on copper film using PECVD?
Growing SiN on copper film using PECVD?
2006-04-04
Xiaoding wei
2006-04-19
K A Chan
Cu will be oxidized Re: Growing SiN on copper film using PECVD?
2006-04-23
[email protected]
Cu will be oxidized Re: Growing SiN on copper filmusing PECVD?
2006-04-24
Glenn Silveira
2006-04-25
K A Chan
Cu will be oxidized Re: Growing SiN on copper film using PECVD?
2006-04-26
[email protected]
Growing SiN on copper film using PECVD?
K A Chan
2006-04-19
Yes. You can. SiN layer can be used as Cu diffusion layer.

----- Original Message -----
*From:* "Xiaoding wei" 
*To:* [email protected]
*Sent:* 04 April 2006 03:46:34
*Subject:* [mems-talk] Growing SiN on copper film using PECVD?


> Hi, Does anyone know if I can grow a SiN layer on copper film using
> PECVD method?
reply
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