Dear All,
I am trying to deposit a suspended metal layer over a sacrificial layer. Is any
material that can be used as a sacrifical layer that:
1) Can be removed without using ultrasonic bath. The ultrasonic bath seem to
liftoff my metal structure as well.
2) Can be removed without RIE etching. The RIE etching has to be isotropic in
order to etch out the underneath sacrificial layer. Our nanofacility doesn't
have a very good etcher.

I tried NR7, but it is pretty sticky, without utlrasonic, it is very hard to
remove completely. Can I use SU-8 ?

Any help and suggestion will be highly appreciated.
Thanks very much
Jay.J. Wang