Sounds interesting--What about grayscale lithography and dry
etching?

        William Lanford-Crick
        Micro and Nanotechnology Laboratory and
        Department of Electrical and Computer Engineering
        University of Illinois at Urbana-Champaign


Subject: [mems-talk] Silicon Ramp Needed

        OK Mems people, work with me. This is a real question.  How can I
make a
        silicon ramp 5um tall on one end and 1um on the other, 250um long,
5um
        wide?  I'm starting with a 5um layer of Si on a substrate.  The real
        question is how to etch/make a smooth, ramp, type structure.  I feel
a few
        lith steps of 1um 4 times to build "stairs" and then figure a way to
smooth
        the 1um steps.  Anyone????